SPIE Advanced Lithography + Patterning

The event for emerging technology in the semiconductor industry

Share your research, challenges, and breakthroughs with colleagues in San Jose

The call for papers is open for the 2025 event. Submit your abstract and join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.

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Explore six great conferences

Optical and EUV Nanolithography
DTCO and Computational Patterning
Metrology, Inspection, and Process Control
Novel Patterning Technologies
Advances in Patterning Materials and Processes
Advanced Etch Technology and Process Integration for Nanopatterning

Prepare your abstract

Review everything you need to know about submitting your abstract for SPIE Advanced Lithography + Patterning 2025.

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Be part of the 2025 program

Join your community in San Jose and enjoy:

Plenary talks
Technical presentations
Networking sessions
Course offerings
Exhibition

Presenter at SPIE Advanced Lithography + Patterning

Highlights from the 2024 event

A wonderful week in San Jose

View daily image highlights and social media activity from a packed week of presentations, networking, and the latest technology in San Jose, California.

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Learn about career opportunities

Watch a webinar recording from the semiconductor lithography community

Check out this webinar recording covering the basics of semiconductor lithography, available careers in the field, and a preview of Advanced Lithography + Patterning 2024. Opportunities for students to apply for full funding to attend the event are also included in the discussion.

Watch to learn more!

Add a course to your conference experience

Choose from a selection of highly valuable topics

Take advantage of the courses offered on-site in San Jose that align with lithography and patterning topics. Course offerings will give you the technical training you need to excel in your field. Interested in becoming an SPIE instructor? Visit the courses page to learn more.

Attendees of SPIE Advanced Lithography + Patterning take a course

Exhibition at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and get business done. Find these technology solutions and more:
• Photoresist, EUV, and other specialty materials
• E-beam lithography systems
• Precision cleaning, contamination, transport support materials
• Wafer treatments and substrates

Opportunities for students

Students: Learn how to attend this event for free

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage with and learn about the semiconductor industry, as well as share their latest research in lithography and photomask technologies. Leading companies support student participation through grants and awards, and tech groups offer scholarships for graduate and undergraduate applicants.

Student authors at SPIE Advanced Lithography + Patterning meet and network

Proceedings will be published on the SPIE Digital Library

Presentations become published works

SPIE Advanced Lithography + Patterning conference proceedings are published in the SPIE Digital Library. All paid conference registrations include proceeding downloads and ongoing access through your SPIE account.

Visit the Digital Library to see all past years' proceedings from this meeting.

Person browses SPIE Proceedings in SPIE Digital Library